| 摘要 |
PURPOSE:To attain high control accuracy by detecting a temperature of fluid so as to correct a controlled flow from table information deciding the opening of a digital valve thereby eliminating the control error due to temperature change. CONSTITUTION:An output of a programmable sequencer 2 setting the control procedure of a valve 6 is given to a control unit 1 driving a pulse motor 7 of the digital valve 6 based on the table information and switch groups A1- An comprising digital switches 3a-3n for setting flow and same switches 4a-4n for setting moving pattern are connected thereto. The flow is controlled by both the setting signals via a driver 5. Further, the unit 1 is provided with a temperature correcting adaptor 12 to correct the flow based on the detected temperature of the fluid. Then the flow and temperature of the delivery side of the valve 6 are detected by a flowmeter and a temperature detector 14 and the opening correcting amount is operated by the adaptor 12 via A/D converters 15, 16. |
