摘要 |
PURPOSE:To increase the quantity of signal charges stored without deteriorating the degree of integration by forming an intermediate electrode and storing signal charges by using the intermediate electrode. CONSTITUTION:An intermediate electrode is shaped, and signal charges are stored between the intermediate electrode and a lower electrode and between the intermediate electrode and an upper electrode. That is, when a signal is written, an electric signal is transmitted through an N<+> diffusion layer 8, + potential is applied to a second conductive film 6, the N channel transistor is brought to an, 'ON' state, and the signal is transmitted over an N<+> diffusion layer in the lower section of a first conductive film 4 and a third conductive film 15 from an N<+> diffusion layer 7. Consequently, signal charges are each stored in capacitors through thin insulating films 3, 11, 13 between an inversion layer 10 on a substrate and the first conductive film 4, between the third conductive film 15 and the first conductive film 4 and between the third conductive film 15 and a fourth conductive film 12. Accordingly, a signal on reading can be enlarged, and the deterioration of the degree of integration is also prevented. |