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经营范围
发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPS63492(A)
申请公布日期
1988.01.05
申请号
JP19860141805
申请日期
1986.06.18
申请人
ANELVA CORP
发明人
TAKAHASHI HIDEKI
分类号
C23F4/00
主分类号
C23F4/00
代理机构
代理人
主权项
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