| 摘要 |
PURPOSE:To speed up shape inspection while maintaining the resolution in the height direction of a body to be inspected by providing two lines sensors which detect a light cutting line in two mutually different directions. CONSTITUTION:A light irradiating means (cylindrical lens 11, etc.) irradiates the body M to be inspected (parts) with a linear light beam l2. Then, a detecting means (reflected light image forming lenses 12 and 15, etc.) detect a light cutting line L formed on the parts M by the irradiation of the laser beam l2 through two lines sensors 14 and 17 in two mutually different height directions. Then, an image composing circuit 18 rearranges detected images obtained by the two line sensors 14 and 17 alternately to form one image, thereby obtaining a light cutting images along the light cutting line L. Then, a decision circuit 19 decides the three-dimensional shape of the parts M based on the light cutting images obtained by the image composing circuit 18. Thus, the inspection is speeded up while the resolution in the height direction of the body to be inspected is maintained. |
