| 摘要 |
PURPOSE:To accurately measure the magnetic permeability of a soft magnetic thin film by providing wiring to a sample part consisting of a substrate and the soft magnetic thin film and measuring its self-inductance. CONSTITUTION:A coil 3 for measuring self-inductance is arranged on the side of a sample 1. Then, Rf=l/muo.Xmur.w.d, where Rf is the magnetic resistance of the sample 1, l the length, (w) the width, (d) the thickness, mum the magnetic permeability of the soft magnetic thin film 5, and muo the magnetic permeability under a vacuum. Further, L-L0approx.=N<2>/Rf, where L is the inductance of the coil 3 when the sample 1 is fitted, L0 is the inductance of the coil 3 when not, and N is the number of turns of the coil 3; and the Rf is found, so the magnetic permeability mur is accurately found.
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