PRODUCTION OF THIN 'PERMALLOY(R)' FILM

摘要

PURPOSE:To well control the composition and to improve the accuracy by forming a multilayered film in high vacuum by ion plating or other method and by mixing the constituent metals of the film with each other by an ion beam mixing method. CONSTITUTION:A multilayered film consisting of alternately laminated Ni and Fe layers is formed on the surface of a substrate in high vacuum by ion plating, sputtering, vacuum deposition or other method. Ion beams are then projected on the film with 10-300keV acceleration energy to mix the constituent metals of the film with each other. Ions of an inert gas such as Ar, Kr or Xe and/or N ions are used to project the ion beams.