| 摘要 |
PURPOSE:To attain a shortest time of an origin detection sequence by using an absolute position detection device for detecting an entire moving range of a table thereby grasping a positional relation between the origin and a current position before entering the origin detection sequence. CONSTITUTION:At first an absolute position of a table 1 is read by a reading head 14 of an absolute position detection device 13 to determine if the table 1 is within an A range 15. If the table 1 is not within the A range 15, the table 1, after being moved into the A range 15, beings to move to the side of a B end 12. After that, confirming that the reading head 14 of the absolute position detection device 13 passes a reference point 11, the table is moved as far as a reading head 8 of a relative position detection device 6 having an origin detects an origin 7 to complete a sequence of the origin detection. Thus, since there is not need for moving the table to an end of a table movement range, namely A end, at the start of the origin detection sequence to perform succeeding sequences, a loss of time can be eliminated.
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