| 摘要 |
PURPOSE:To mass produce optical disks at a low cost by providing a main vacuum deposition chamber provided with two main vacuum evacuation devices and preliminary vacuum chambers respectively having intrinsic vacuum evacuation device before and behind said chamber at the time of forming a reflection film consisting of Al, etc., on a disk substrate by a sputtering device and producing the optical disk. CONSTITUTION:The resin substrate 2 made of polycarbonate, etc., is used and the Al film is formed on the surface thereof by sputtering an Al target 23 at the time of producing the optical disk such as compact disk (CD). Since H2 and O2 are much adsorbed on the above- mentioned resin substrate, the substrate 2 is first put into a 1st preliminary vacuum chamber 16 and the inside of the chamber is evacuated by the vacuum evacuation device 17 to get rid of the H2O and O2; thereafter, the substrate is put into the main vacuum deposition chamber 20, where the H2O and O2 are thoroughly removed from the substrate by using either of the main vacuum evacuation devices 21, 22. After the Al target 23 is sputtered to make vapor deposition, the substrate is discharged through the preliminary vacuum chamber 18. The evacuation device 21 of the main vacuum deposition chamber 20 is changed over to the auxiliary main vacuum evacuation device 22 and the operation is continued if said device is damaged by the H2 and O2 to prohibit the execution of the treatment. The mass production is thus executed without lowering the working efficiency.
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