| 摘要 |
PURPOSE:To prevent waste of electric power and abnormal arc discharge by electrically insulating a vacuum vessel from an electric circuit connecting both discharged electrodes, and inserting a conductor connected to the first discharge electrode in the electric circuit into a rotating shaft. CONSTITUTION:Plural seal rolls and a seal chamber are provided in the traveling direction of a sheet material. The inside of the seal chamber is evacuated, the pressure in the vacuum chamber 1 is reduced stepwise from the atmospheric pressure and kept at a specified pressure by the help of reserve vacuum chambers 9 and 10. The sheet material A is sent out from a rewinder 11, guided by many guide rolls 12, and wound on a winder 13 along the outer peripheral surface of a rotated drum electrode 2. Namely, the sheet material A of the rewinder 11 is continuously treated at a low temp. with plasma on the drum electrode 2 in the vacuum vessel 1 contg. a plasma atmosphere, and wound on the winder 13. |
