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发明名称
ALUMINUM DISK WASHER
摘要
申请公布号
JPS62286583(A)
申请公布日期
1987.12.12
申请号
JP19860130322
申请日期
1986.06.06
申请人
FURUKAWA ELECTRIC CO LTD:THE
发明人
KOMURA YUKIO
分类号
B08B3/08;H01L21/304
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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