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发明名称
PROBING SYSTEM
摘要
申请公布号
JPS62284387(A)
申请公布日期
1987.12.10
申请号
JP19860128700
申请日期
1986.06.03
申请人
HITACHI ELECTRONICS ENG CO LTD
发明人
SAKAMOTO TOSHINORI;TAKAHASHI MASUO
分类号
G09F9/00;G01R31/02;H01L21/66
主分类号
G09F9/00
代理机构
代理人
主权项
地址
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