| 摘要 |
PURPOSE:To enable accurate quantitative analysis with only one analyzer with a higher determination accuracy, by calculating the proportion of area in the surface of a sample for each phase from image data created by reflected electron or the like to determine the presence of elements in the sample. CONSTITUTION:First, the surface of a sample is scanned by an electron beam B, the reflection thereof from the sample S is detected with a reflected electron detector Ds and a data for an image of the surface of the sample created by the reflected electron is taken into a memory M. Then, the electron beam B is fixed, the sample S is driven to scan the surface thereof and an output of an X rays detector Dx is taken into the memory M as image data. For the determination of elements A constituting particles marked as A, the image data created by the reflected electron in the memory M is binarized to determine the proportion of area of the particles A dispersed in the surface of the sample and the results are multiplied by the density of the elements A in the dispersed particles which is obtained from an actually measured value of the intensity of characteristic X-ray of element A whereby the density of the elements A in the sample can be determined. The image of the surface of the sample created by the reflected electron or the like provides a high positional resolution and a high clearness thereby enabling accurate determination of area for each phase.
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