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发明名称
HEAT INSULATOR FOR SEMICONDUCTOR MANUFACTURING FACILITIES
摘要
申请公布号
JPS62283883(A)
申请公布日期
1987.12.09
申请号
JP19860124497
申请日期
1986.05.29
申请人
IBIDEN CO LTD
发明人
FURUKAWA MASAKAZU
分类号
H01L21/205;C04B38/00;C23C16/46;C23C16/50;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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