发明名称 |
Pressure measuring element |
摘要 |
A pressure measuring element includes a plate-shaped substrate of ceramic material and a membrane deformable in response to pressure fluctuations. The membrane is made of ceramic material and is mounted to the upper side of the substrate. A pressure-sensitive resistor for measuring pressure is positioned inside the membrane. A heating resistor element is positioned on the underside of the substrate, which maintains the temperature of the substrate constant. A temperature sensor is also arrayed on the upper side of the substrate near the membrane.
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申请公布号 |
US4711130(A) |
申请公布日期 |
1987.12.08 |
申请号 |
US19860880006 |
申请日期 |
1986.06.30 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
GLAS, HANS J.;HECHT, HANS;MUELLER, KLAUS;SPITZENBERGER, KURT;STECHER, GUENTHER |
分类号 |
G01L9/12;G01L9/00;G01L19/04;(IPC1-7):G01L7/08 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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