FERROELECTRIC LIQUID CRYSTAL DISPLAY PANEL

摘要

PURPOSE:To decrease man-hours and to maintain a uniform cell spacing by providing low-resistance conductive bus bars on an electrode and providing an insulating material of a prescribed thickness on the bus bars. CONSTITUTION:A Cr of Al layer is provided by an EB vapor deposition method as the low-resistance conductive material over the entire region on the electrode 3 which is preliminarily formed to a stripe shape on a glass substrate 1 and a photosensitive polyimide is coated as a photosensitive org. high-polymer film layer 7 on the Cr or Al layer by a spinner method. The photosensitive polyimide film is then exposed and developed by using a belt-like mask pattern of 1mm pitch formed to 50mum width and 950mum spacing from the adjacent bars. The Cr of Al layer of the unnecessary part is thereafter etched by an etching soln. to form the bus bars 5 deposited with the photosensitive polyimide on the belt- like Cr or Al. The film thickness of the photosensitive polyimide is controllable as desired by changing the rotating speed of the spinner and the concn. of the photosensitive polyimide.