| 摘要 |
PURPOSE:To dissolve difficulty in separation due to residual electric charge so as to be capable of transferring an absorbed material by providing a pin mechansim capable of projecting out of the absorptive surface in order to have the absorbed material broken away. CONSTITUTION:A wafer transfer hand 19 driven by a conveyor mechansim 3 stands by in a load lock chamber 2. Said hand transfers a wafer 5 toward the electrostatic absorption device 7 of a wafer holder 4. An electrostatic absorption electrode 11 is formed on the surface of a ceramic substrate 12, on which a smooth insulating film 10 is formed. And a pin 8 capable of projecting out of the surface while penetrating through the substrate 12 is provided at an electrode section 11 wherein a nozzle hole 9 is provided at the center of the pin 8. Said pin 8 is so controlled from the outside as to project out of the surface of an insulating film 10 on the electrode 11 for pushing up the absorbed wafer 5 from below so as to dissolve absorption.
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