| 摘要 |
PURPOSE:To improve the position accuracy and position resolution and to improve the symmetry of slit opening and closing by using a piezoelectric element for an opening and closing slit mechanism and transmitting the motion to an opening and closing slit through an expanding and contracting mechanism. CONSTITUTION:The piezoelectric element 1 performs linear motion and is fixed to two expansion and contraction arms 2, which are coupled with the opening and closing slit 4 respectively. The opening and closing slits 4 are sandwiched between slit guides 8 and movable to the right and left, moving arms 10 are fixed to the opening and closing slits 4, and symmetrical holding arm 6 are coupled with the moving arms 10. Consequently, variation in the length of the piezoelectric element 1 is transmitted through the expansion and contraction arms 2 to open and close the opening and closing slits 4. At this time, when the magnification of the variation of the piezoelectric element 1 is varied, the expansion and contraction arm fulcrum 3 is shifted in position to set the magnification freely.
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