| 摘要 |
<p>PURPOSE:To quickly and thoroughly remove static electricity from a substrate surface by interposing and holding an insulating layer having >=5mm thickness between the substrate surface and object surface having approximately the grounding potential at the time of sprinkling ionized air to the substrate in order to remove the static electricity. CONSTITUTION:A lower substrate 2 on which a liquid crystal orientation control film 9 is formed is fixed onto a vacuum suction plate 51. The plate 51 is imposed via a spacer 52 consisting of an insulator onto a base 53. The space 52 is formed of a polystyrene resin having 10mm thickness. The surface of the liquid crystal orientation control film 9 is rubbed by a buffing cloth 55 wound on a roller 54 and the electrostatic charge generated on the liquid crystal orientation control film 9 re removed by an ion blower 56. Since the insulating layer of (substrate thickness+spacer thickness, i.e., 11mm) is disposed between the object surface having the grounding potential and the top surface of the substrate, the capacity to ground is about 0.09pF/cm<2>. The charged voltage is 3,300V when said layer is electrified to -3,000pC/Cm<2>. Since the electric field by the same is large, the force from the ion blower 5 to attract the ions of the code reverse from the code of the electrostatic charge is large and the destaticization is quickly executed.</p> |
