| 摘要 |
PURPOSE:To rapidly and accurately compare patterns by moving a reference pattern which is picked up as an image and stored in advance to the position of a pattern to be inspected which is picked up as an image by the digital processing. CONSTITUTION:When the image picked-up reference pattern stored in a reference pattern storage means A and an address are designated, the digital reference pattern data are compared with the digital pattern data to be inspected picked-up on image by an arithmetic processing means B and a moving command in the horizontal direction is supplied to a parallel movement signal making means D. Then, the means D supplies a horizontal direction movement signal to an addition means E which adds the address corresponding to the horizontal address movement and supplies it to the means A. As to a vertical address, the reference pattern data are moved horizontally and vertically by the digital processing in the same way. The reference pattern is turned via a turning signal making means C by the digital processing in the same way and the reference pattern is moved as desired by the digital processing without controlling the feedback, etc., and the patterns can be compared rapidly and accurately.
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