摘要 |
A diaphragm and chamber device including chamber means for defining a chamber having fixed position walls on opposite sides, a diaphragm in the chamber and sealably mounted between the walls to define first and second regions therein on opposite sides of the diaphragm, the diaphragm being movable in the chamber so as to change the volume of the two regions as the diaphragm moves toward either the wall, a magnet carried by the diaphragm and movable therewith, and a magnet position sensor carried by a the wall and sensing the location of the magnet and thus the diaphragm. |