| 摘要 |
PURPOSE:To eliminate a non-modulation gap and facilitate design and control with simple construction using less number of electromagnetic coils by furnishing a rotor and a stator each having two yokes forming two sets of gap magnetic paths facing each other. CONSTITUTION:Flux PHI1 is passed from N to S pole of a permanent magnet 9 of a rotor 1. That is, from a gap magnetic path G1 via solenoid yokes 6, 7 of the stator, the flux PHI1 shall flow into a gap magnetic path G1. Then the flux PHI1 shall flow into the yoke 5 from the yoke 7 through a gap magnetic path G2 for returning to the S pole, and thereby magnetic attraction force is applied to said gap magnetic paths G1, G2 between the yokes 4, 6 and 7, 5. Displacement of the rotor 1 is sensed by a location sensor 13 for X axis, and current is allowed to flow in solenoids 12a, 12c to allow a flux PHI2 to flow in such a direction as to set off change of the attraction force of the flux PHI1 caused by the permanent magnet 9. Thereby the whole attraction force is balance, and the rotor 1 is restored to the neutral position as original.
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