| 摘要 |
PURPOSE:To take a measurement speedily and accurately by using both detecting elements by providing the two detecting elements which have their axes in parallel to a Z-axial line and are displaceable in the Z-axial direction and in neither the X-axial direction nor the Y-axial direction. CONSTITUTION:A couple of columns 2 are stood on both sides of the X-axial direction of a pedestal 1 and a lateral beam member 3 which guides an X slider 4 slidably in the X-axial direction is extended between the columns 2. Then, Z guide box 5 provided to the X slider 4 integrally supports a spindle 6 as a Z-axially displaceable member and a prismatic body 25; and the spindle 6 is provided with a touch signal probe 11 as a detecting element and the prismatic body 25 is provided with a lens barrel which has the Z axis set to a video camera 21 as a detecting element. Consequently, the prismatic body 25 and spindle 6 are displaceable relatively in the Z-axial direction, so while one detecting element is in measuring operation, the other detecting element never disturb the operation and the measurement is carried out speedily and securely.
|
