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发明名称
ION BEAM IMPLANTATION
摘要
申请公布号
AU567190(B2)
申请公布日期
1987.11.12
申请号
AU19840033870
申请日期
1984.10.05
申请人
WESTINGHOUSE ELECTRIC CORP.,
发明人
AJEET ROHATGI;PROSENJIT RAI-CHOUDHURY;JOSEPH ROBERT GIGANTE;RANBIR SINGH;STEPHEN JOSEPH FONASH
分类号
H01L21/265;H01L21/30;H01L21/324;H01L31/04;(IPC1-7):H01L21/265;H01L31/18
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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