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发明名称
ION SOURCE APPARATUS
摘要
申请公布号
EP0095311(B1)
申请公布日期
1987.11.11
申请号
EP19830302804
申请日期
1983.05.17
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
SUGAWARA, TORU;ITO, YASUYUKI
分类号
H01J27/08;(IPC1-7):H01J27/08
主分类号
H01J27/08
代理机构
代理人
主权项
地址
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