| 摘要 |
PURPOSE:To manufacture continuously, efficiently and economically a photoconductive member by using a device in which each chamber for executing a series of processes is connected to each other by a door, in a manufacturing method of said member by a CVD method, etc. CONSTITUTION:An object to be worked is processed successively by using a device (a symbol A1 denotes an inlet door of a throwing-in chamber, and F3 denotes an outlet door of a carrying-out chamber) formed by connecting a supporting body throwing-in chamber A (symbols A2-F2 denote vacuum pumps), a supporting body heating chamber B, a reaction chamber C for forming a photoconductive thin film on a supporting body, an annealing chamber D for annealing the thin film, a cooling chamber E of a formed photoconductive member, and a carrying-out chamber F of the photoconductive member, which are capable of pressure reduction independently, respectively, in said order through doors B1-F1. Accordingly, for instance, when a heated supporting body is moved to the reaction chamber C, the door C1 is opened in a state that the door B1 and D1 are closed, the supporting body is shifted to the chamber C from the chamber C and the door C1 is closed, and thereafter, only the chamber C is brought to discharge to a prescribed pressure by the pump C2, and discharged air quantity is extremely small. Also, in each chamber, the processing under a different pressure can be executed. |
