| 摘要 |
PURPOSE:To achieve an in-plane uniform composition in thin-film elements of tens of thousands of batches by one manufaturing process, by bonding an upper and lower magnetic bodies composed of thin films of a uniform composition, which is manufactured from a bulk material by alternately repeating heat treatment and rolling, to each other by using fine particles. CONSTITUTION:A lower magnetic film is formed by scattering fine particles of gold on the film 22 of a base plate composed of a wafer 21 and alumina film 22 and pressing another base plate against the film 22 and a lower magnetic core 23 is formed by patterning the product to a prescribed shape. An alumina film 24 for gap is formed on the alumina film of the core 23 and base plate and a polyimide resin film 25 is formed by removing the alumina film 24 of the part which becomes the magnetic gap after removing the film 24 at the part which is made to contact with the upper magnetic core and on the base plate. Then conductor films 26 are formed by using copper which is small in resistivity and a polyimide resin film 27 is applied to the spaces between each of and on the conductor films 26. After applying, the resin film 27 is flattened. After scattering fine particles of gold on the core 23 and its exposing section, a magnetic thin film is pressed against the resin film 27 so as to form an upper magnetic film. The upper magnetic film is patterned to a prescribed shape, and thus, an upper magnetic core 28 is obtained.
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