RADIATION SENSITIVE POLYMER COMPOSITION

摘要

PURPOSE:To obtain a radiation sensitive polymer composition not lowering sensitivity to radiation even in the presence of oxygen in the air or the like by using a combination of a polymer having propargyl groups on the side chain with a specified compound. CONSTITUTION:The radiation sensitive polymer composition contains the polymer having propargyl groups on the side chain with the compound to be allowed to generate cations by irradiation of radiation. Said polymer comprises repeating structural units in an amount of 20-100 unit % of the total repeating structural units, and said compound to be used in combination with said polymer is such as onium salts and p-quione diazide compounds.