| 摘要 |
PURPOSE:To inspect all air pads before use and to discriminate whether they are normal or not by pressing an air pad from above automatically and detecting the pressing force. CONSTITUTION:The air pad P is mounted on a table 33. The air pad P has a hemispherical groove formed almost in the center part and a ball B which has a thin projection body upward is provided in the groove. Then when constant air pressure is applied to the air pad P, the air pad P floats over the table 33. In this state, compressed air is supplied from an air pressure source 31 to operate an air cylinder 15 and a piston rod 21 moves down to press a pushing element 23 against the projection body of the ball B on the air pad P. This air is measured by a pressure sensor 27 and the variation of the air formed between the table 33 and air pad P based on the air pressure, i.e., the quantity of flotation of the air pad P is measured by a fine contact displacement gauge 35. Then, conforming and nonconforming air pads are decided based on a reference air pad P by using the measurement data.
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