| 摘要 |
PURPOSE:To prevent disturbance and unstable electrodes from varying the potential of a shielding electrode by providing the shielding electrode between the disturbance electrode and the unstable electrode to be superposed each other. CONSTITUTION:A shielding electrode 7 to which a predetermined potential is applied is inserted to between two disturbance and unstable electrodes 3a, 5a to shield therebetween is made of a polycrystalline silicon electrode, insulating layers 4a formed twice before and after forming the electrode 7 are silicon dioxide stacking layers, and even if two signal wirings are crossed, they are not shortcircuited. Thus, the electrodes 3a, 5a and lines of electric force directed to the opposed electrode are terminated at the electrode 7, and even if one is abruptly varied at its potential, it does not affect the influence to the other.
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