| 摘要 |
PURPOSE:To manufacture a cobalt ferrite vertical magnetization film proper to light-heat magnetic recording by causing a reaction gas to flow into plasma obtained by magnetron discharge at low pressure (10<-1>-10<-4>Torr) or plasma acquired by electron cyclotron resonance (ECR). CONSTITUTION:Cobalt ferrite is obtained at room temperature by using a plasma CVD method acquired by magnetron discharge or electron cyclotron resonance (ECR). The vapor of a metallic chelate containing Co, Fe and M (where M represents either one kind of Al, Cr, Fe, Gd, Mn and In) such as Co(C5N7O)3 (cobalt acetylacetone) and Fe(C5R7O)3 (iron acetyleacetone) and oxygen as a reaction gas are introduced into a reaction vessel (a chamber) decompressed to 10<-1>Torr-10<-4>Torr, and high-frequency or microwave plasma is generated, thus precipitating a cobalt ferrite crystal on a substrate.
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