| 摘要 |
PURPOSE:To enable detection of fine water drops, by forming opposed electrodes with different pitches therebetween. CONSTITUTION:A window shielding glass 2 is placed into a vacuum film former and an ITO transparent conductive film 21 is deposited on the glass from above a pattern 18 of a masking agent to be attached almost evenly onto the film and then the work is withdrawn from the vacuum film former to remove the masking agent 18 together with the ITO film 21 thereon. By so doing, a comb- teeth type electrode with a coarse pitch and a power feeding electrode are completed. Thereafter, a resist film 22 is applied evenly on an area 20, a mask 23 which is formed by patterning chromium on a glass dry plate 24 at a fine pitch is placed thereon and the resist film is exposed to ultraviolet rays. Then, the work is immersed into a developer, washed with water to remove the resist film exposed and immersed into an etching liquid to remove the ITO film. Moreover, it is immersed into a sulfuric acid-hydrogen peroxide solution to remove the resist film 22. Thus, a rain drop sensor 1 combines two comb-teeth electrodes, the one coarse and the other fine in the pitch. |
