| 摘要 |
<p>SPUTTERING DEVICE SUITABLE FOR PERPENDICULAR RECORDING MEDIUM A magnetic recording medium conventionally utilizes the inplane magnetization mode, but recently the perpendicular magnetization mode utilizing the perpendicular anisotropy of an hcp cobalt alloy layer, in which the C axis is oriented perpendicular to the layer surface, has been proposed. The known perpendicular magnetic recording medium, is produced by means of RF sputtering and comprises a Permalloy layer, a layer of a low coercive-force material, between the nonmagnetic base and the hcp cobalt alloy layer. The present disclosure presents a sputtering device for use in preparing a perpendicular magnetic recording medium; the apparatus includes a vacuum vessel, at least one pair of opposed targets which are arranged in the vacuum vessel, a device for generating a magnetic field disposed between the pair of targets in a direction perpendicular to each of the targets, with each being located behind each of the targets. At least one pair of conveyable holders for a nonmagnetic base is provided with each holder being located beside a space between the pair of targets, and facing the space, and being conveyed in a direction perpendicular to the targets. Layers having the composition of the targets are deposited on the nonmagnetic base by sputtering.</p> |
