| 摘要 |
PURPOSE:To attain highly accurate patterning to the magnetic film tip of a thin film magnetic head by dividing the stage into two, the stage forming only the magnetic core tip and the stage forming the part except the tip. CONSTITUTION:A lower magnetic film 12 and a gap material 15 are formed on a ceramic base 11. Then an upper magnetic film tip 14 is formed. In this case, since a background step difference is small in the stage forming a photosensitive resin film pattern, the photosensitive resin film is formed thinly to attain highly accurate patterning. After a conductor coil 16 and an organic insulation film 17 are formed, the upper magnetic film 13 except the tip is formed. Then the film 13 is etched to obtain a thin film magnetic head. In this case, although the patterning accuracy is deteriorated in the step difference lower part of the film 17, the request dimension accuracy of the part is not comparatively severe and no problem exists. According to the method, since the patterning is attained while the photo mask and the thin photosensitive resin surface are adhered excellently, the highly accurate magnetic film shape is formed. |
