| 摘要 |
PURPOSE:To set an X-ray incident angle larger than the critical incident angle of Fresnel reflection by superposing multi-layered films having continuously changed film thicknesses on the paraboloid of a mirror body so as to generate Bragg reflection with X-rays. CONSTITUTION:The film 3 on the paraboloid 1 of a Cu body 2 is the lamination of a film pair 6 of films 4, 5 having thicknesses dA, dB and is a combination of the heavy element film 4 consisting of W, etc., and the light element film 5 for a spacer consisting of C, etc. The diffusion at the boundary face is small and is stable with this combination and thetam is much larger than the critical incident angle thetac in Fresnel reflection when mlambda=2(dA+dB)sinthetam is set where an incident X-ray wavelength is lambda and the incident angle at the max. reflection X-ray is thetam. The adjustment of the incident angle is flexibly executed over a wide range by such constitution, by which the size of the device using the multi-layered film mirror is reduced.
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