| 摘要 |
PURPOSE:To provide a remarkably higher heat conductivity of a sintered aluminum material than a conventional one, by specifying a half width of a diffraction beam from (213) face of aluminum nitride powder in an X-ray diffraction pattern using Cu-Kalpha radiation. CONSTITUTION:Aluminum nitride for producing a sintered aluminum nitride is adjusted to <=0.35deg half width of a diffraction beam from (213) face of aluminum nitride powder in an X-ray diffraction pattern using Cu-Kalpha radiation. When the lattice strain of the aluminum nitride powder is reduced as described above, the aimed sintered aluminum nitride material having a remarkably higher heat conductivity than that of a conventional one is obtained. |
