发明名称 SEMICONDUCTOR SUBSTRATE
摘要 <p>PURPOSE:To easily confirm the directivity of a semiconductor substrate by a method wherein the two points where the edge of the notch of the substrate becomes the circumference of the semiconductor substrate are chamfered in the radiuses different with each other. CONSTITUTION:A notch 102 is Provided on a semiconductor substrate 101 for confirmation of directivity. The notch 102 comes in contact with the circumfer ence 103 of the substrate 101 at the two points of 104 and 105. A chamfering work is performed on the two points 104 and 105 of the notch 102 in the radius es of 106 and 107 which are different with each other. As a result, the directivity of the substrate can be confirmed easily.</p>
申请公布号 JPS62239517(A) 申请公布日期 1987.10.20
申请号 JP19860083477 申请日期 1986.04.10
申请人 NEC CORP 发明人 YAMANAKA YOJI
分类号 H01L21/02;H01L21/677;H01L23/544 主分类号 H01L21/02
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