| 摘要 |
PURPOSE:To facilitate manufacture and to improve a yield and an electromechanical transfer efficiency by forming grooves in lateral and longitudinal direction on ceramic from its upper surface, filling an adhesive, providing electrodes on both end surfaces of each ceramic piece, forming probe element blocks, arraying them laterally and longitudinally on the surface of a fixed plate, and adhering and fixing them. CONSTITUTION:The longitudinal groove 4C and the lateral groove 4d are formed along peripheral edges 4a and 4b on a previously polarized rectangular ceramic 4 with a comparatively thick thickness from its upper surface, and the adhesive 5 such as epoxy resin is filled in said grooves 4c and 4d to be cured. The botton side joint part 4f of each ceramic piece 4e is separated at a position shown by a broken line 6. The both surfaces 7a and 7b of a ceramic aggregation body 7 are grounded to finish in the prescribed thickness. Electrodes 8 are provided on the both end surfaces of each ceramic piece 4e. The probe element blocks 3 are arranged laterally and longitudinally along the peripheral edges 2a and 2b on the surface of one fixed plate 2 and fixed with the adhesive, thereby obtaining a ultrasonic probe 1 with a large diameter. Accordingly the ultrasonic probe with a large diameter can be easily produced and the yield can be improved.
|
