| 摘要 |
<p>Installation and process for producing integrated circuits comprising Si or GaAs wafers, consisting of storage containers for several processing media such as various acids and solvents or cleaning agents, with measurement, filling, pumping and extraction systems as well as a processing unit for performing the processing operations on the Si or GaAs wafers which for transport and processing are arranged packet-wise, one over the other in support units referred to as trays. The disc-like rotary table, arranged in the processing container and equipped with vertical holding pins for receiving and fixing the tray-holders which can be inserted with grippers, is provided with program-controllable rotary drives for a high rotation speed for drying, a low rotation speed for spraying and for intermittent pivoting to enable passage into the loading and unloading position; it is also provided with the central spray rod projecting from below into the processing container and capable of being rotated with its own drive, with several sets of nozzles arranged thereon and with separate feed lines for the processing media passing through the central store of the rotary table and spray rod, leading from the stand-alone, mobile and readily-disposable units, each containing a specific processing medium.</p> |
