ELECTRODE FOR FORMING COMPOSITE PROTECTIVE FILM

摘要

PURPOSE:To make film thicknesses the same on the front and rear by disposing a magnetic disk to a desired position between two sheets of electrodes and depositing plasma-polymerized films on both faces of the disk. CONSTITUTION:The electrode body 1 consists of the high-voltage side upper electrode 2 and the earth side lower electrode 3. The magnetic disk 4 is disposed between these electrodes 2 and 3 and the plasma-polymerized films (e.g.: molybdenum sulfide films) are deposited on both faces of the disk 4. The spacing lbetween the electrode 3 and the disk 4 is preferably made 0.3-0.6h when the spacing between the electrodes 2 and 3 is designated as h. The protective films are simultaneously formed on the front and rear surfaces of the disk 4 and the thicknesses thereof are made the same by limiting the spacings in the above- mentioned manner.