DEPOSITED FILM FORMING DEVICE

摘要

PURPOSE:To form multi-layered deposited films having uniform characteristics and improved boundary face characteristics with conserved energy by providing means for releasing gases of raw materials between respective substrate installing means for plural substrates which are arranged in a deposition chamber and are to be formed with the deposited films. CONSTITUTION:The paired gas releasing means consisting of pipes 102 for releasing the gaseous raw material for forming the deposited films and pipes 103 for releasing the halogen oxidizing agent are installed in a plurality on the longitudinal central line of a deposited film forming chamber 100. The cylindrical substrates 101 to be formed with the deposited films are disposed on both sides of such gas releasing means. Since the respective gaseous raw materials are released between the rows of the substrates 101, the raw materials for forming the deposited films are effectively utilized. The deposited films are uniformly formed on many pieces of the substrates 101 when the substrates 101 are rotated.