| 摘要 |
PURPOSE:To expand a utilization range of a pressure sensor unit for micropressure being below the atmospheric pressure, by sealing airtightly a package opening part by a sheet-shape diaphragm. CONSTITUTION:An opening part 31 of a package 3 is sealed airtightly by a sheet-shaped waveform diaphragm 4. Accordingly, electrical and mechanical protections of the surface of a pressure sensor chip 1 are executed by the sheet- shaped diaphragm 4. In such a state, a measurement can be executed in the atmosphere such as air containing moisture or corrosive gas, and in a liquid such as water, etc., and a utilization range of a pressure sensor unit for micropressure being below the atmospheric pressure can be expanded.
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