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发明名称
摘要
申请公布号	JPS62154694(U)	申请公布日期	1987.10.01
申请号	JP19860042286U	申请日期	1986.03.25
申请人		发明人
分类号	H01L21/02;H01L21/00;H05K7/20;(IPC1-7):H05K7/20	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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