| 摘要 |
PURPOSE:To easily detect electric characteristics of an electrode to be inspected by arranging an electrode for detection opposite the electrode to be inspected across an insulating film, and detecting the capacity between both electrodes by using a capacity detecting circuit. CONSTITUTION:When the majority of the electrode 1 to be inspected is covered with the detection electrode 2 and set opposite the electrode to be inspected and detection electrode is expressed by C=epsilon0.epsilongammaS///d, where S is the area of the part of the electrode 1 to be inspected which is covered with the detection electrode 1 on a substrate 4, (d) is the thickness of the insulating film, and epsilongammais the dielectric constant. If part of the electrode 1 to be inspected is broken electrically, the capacity C is smaller than the expected value and if short- circuited, the capacity C is larger. For the purpose, when the capacity is not within a certain range based upon the expected value as the center, the electrode is regarded as a defective electrode, thereby easily deciding the defective electrode by one-time inspection.
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