| 摘要 |
PURPOSE:To reduce the number of parts, and to make an optical path length into compression and miniaturization, by setting an optical path which folds for plural number of times between the first mirror and the second mirror arranged in parallel, and using the transparent part of a transparent substrate forming the first mirror, also as the original passing plane of original exposure light. CONSTITUTION:A plate-shaped transparent substrate 28 which forms an original passing plane 28a to perform a slit exposure on an original by a light source, is provided, and the first mirror 28d on which a reflecting film 28c is formed, is provided at a part of a plane on the opposite side of the original passing plane 28a on the transparent substrate 28. The second mirror 38 is provide facing in parallel with the first mirror 28d, and a reduction projecting optical path which folds for plural number of times between the first mirror 28d and the second mirror 38, is provided. Thereby, a constitution is managed with a mirror constitution only by two sheets of parallel mirrors 28d and 38, and a contact glass for the original passing plane, or another mirror that is in charge of the first reflection, is made unnecessary to be provided, thereby, the number of parts can be reduced.
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