| 摘要 |
PURPOSE:To enable the exact and rapid testing of LSI, by fetching automatically logic circuit diagram data, mask pattern data and test pattern data and by moving a probe automatically to a pattern position on a wafer corresponding to the logic circuit diagram data. CONSTITUTION:Mask pattern data subjected to comparison are sent to a wafer position recognition unit 14 through the intermediary of an interface 12 formed by a combination of a timing comparison control 8 and an I/O control 10. The verification of timing comparison is thereby enabled, since functions of an I/O control table and a timing comparison control table are provided. Next, the wafer position recognition unit 14 recognizes a zero point, a reference point on a wafer, inputted beforehand from a comparison unit 6, based on the mask pattern data sent from a comparison unit 6 through the interface 12, and calculates the position of the wafer, based on a pattern size on the wafer. |
