发明名称 MASS SPECTROGRAPH
摘要 PURPOSE:To enable minimal points on a solid to be analized, by providing a mass spectrograph with both of a means in which laser rays are radiated on a sample housed in a sample tube, and a means in which the position of the sample is observed and adjusted. CONSTITUTION:A mass spectrograph is provided with both of a means in which laser rays 12 are radiated on a sample 4 housed in a sample tube 1, and a means in which the position of the sample is adjusted by a position adjuster 8 installed inside a probe 2. While the sample 4 is fixed inside the sample tube 1 which exists on a pointed end part of the probe 2 and observed with a microscope 10, weak laser rays are radiated on the sample 4 to set a radiation position. Then, the laser rays are strengthened to thermally decompose the matter of the analysis point on the sample 4, and the gas generated is provided with electron impact from the ion source 5 so that positively ionized fragment ions can be detected. Hence, analysis of the minimal points, which can not be measured before, can be performed effectively.
申请公布号 JPS62219450(A) 申请公布日期 1987.09.26
申请号 JP19860062849 申请日期 1986.03.20
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 ISAGAWA MITSUO
分类号 G01N27/62;H01J49/04;H01J49/14 主分类号 G01N27/62
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