| 摘要 |
PURPOSE:To enable the maintaining of a high accuracy stable in a wide pressure range, by arranging a pressure receiving plate madae up of a joined laminate of an amorphous alloy layer having a magnetostrictive characteristic and an elastic metal layer for a pressure sensor with the perimeter thereof securely grasped using a ring member through an adhesive. CONSTITUTION:When a pressure receiving plate 3 deflects under a pressure via a fluid pressure introduction port 2c, the magnetic permeability of the pressure receiving plate 3 changes according to the degree of the deflection to vary an inductance of a detection coil 6. Hence, the variation in the inductance can be taken out as electric output with an electricity detection circuit. As the pressure receiving plate 3 is made up of a joined laminate of an amorphous alloy layer having a magnetostrictive characteristic and an elastic metal layer, the plate 3 can be made suitable for various pressure ranges from high to low regardless of the strength and brittleness of an amorphous alloy. The perimeter of the pressure receiving plate 3 is provided with a through hole 3d and securely grasped with ring members 2 and 4 through an adhesive to stabilize an output of this pressure sensor thereby minimizing variation in the quality.
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