CHEMICAL VAPOUR DEPOSITION OF FILMS,申请号GB19870019391-传众专利搜索

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发明名称	CHEMICAL VAPOUR DEPOSITION OF FILMS
摘要
申请公布号	GB8719391(D0)	申请公布日期	1987.09.23
申请号	GB19870019391	申请日期	1987.08.17
申请人	SPECIAL RESEARCH SYSTEMS LTD	发明人
分类号	C23C16/509	主分类号	C23C16/509
代理机构		代理人
主权项
地址

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