| 摘要 |
PURPOSE:To easily manufacture plural vibrators at the same time by cutting signal electrodes which are formed in parallel at every array pitch of vibrator elements in a transversal direction perpendicular to the lengthwise direction. CONSTITUTION:A common electrode is formed on one surface of one vibrator raw material 10 which expands longitudinally and laterally in a plane, and signal electrodes 11 provided with connecting end parts for signal terminals on both side parts alternately at pitch P2 twice the array pitch P1 of individual vibrator elements are formed on the other surface in parallel by as many as plural vibrators. Then, the signal electrodes which are formed in parallel are cut in the transversal direction at every array pitch P1 of vibrator elements along cutting lines 13 perpendicular to the lengthwise direction. Further, the vibrator elements 10 and the common electrode on its reverse surface are cut along cutting lines 14 perpendicular to the transversal cutting direction by every width corresponding to one probe to separate plural vibrators 15a-15d.
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