| 摘要 |
PURPOSE:To enable the plasma treatment of an object to be treated without giving a damage using a short life active species by providing a microwave transmission window which is perpendicular to the electric field of a microwave in a microwaveguide and a metal mesh between a plasma generation region and the object to be treated. CONSTITUTION:A microwave transmission window 3 which is perpendicular to the electric field of a microwave 2 is provided in a microwaveguide 1. A container 4 for treatment is provided outside of the microwave transmission window 3 to make the intensity of the microwave entered in the container 4 through all the surface of the microwave transmission window 3 uniform and the intensity of a reaction gas plasma generated in the region abutted to all the surface of the microwave transmission window 3 of the container 4 for treatment is made uniform. Further, a metal mesh 6 is provided between a plasma generation region 9 and an object 11 to be treated, plasma is confined between the microwave transmission window 3 and the metal mesh 6, a uniform density active species are formed by introducing a reaction gas, the active species are transmitted through the metal mesh 6, guided over the object 11 to be treated by flowing down and the object 11 is chemically treated.
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